步进扫描投影光刻
Step-and-scan Lithography
步进扫描投影光刻机
step and scan projection lithography
step-and-scan lithography system
步进式投影对准曝光器
stepping projection aligner
扫描型投影对准曝光器
scanning projection aligner
镜面投影对准曝光器
mirror projection aligner
远紫外线投影曝光对准器
deep uv projection aligner
扫描投影曝光
scan projection lithography
同步加速器放射线对准曝光器
synchrotron radiation aligner
激光扫描投影
Laser Scan and Projection
扫描投影光刻机
scanning projection lithography tool
scan projection aligner
大型液晶显示基板对准曝光器
aligner for large liquid crystal display substrate
镜面透镜对准曝光器
mirror lens projection aligner
密接-近接对准曝光器
contact-proximity aligner