溅射产额分布  deposition rate

溅射产额能量分布  Sputtering yield energy distributions

辐射产额  Radiation yield

Al-Si-Cu溅射靶材  Al-Si-Cu sputtering target

Ar~+束溅射沉积  Ar + beam sputtering deposition

Ar+束溅射沉积  Ar + beam sputtering deposition

Ar离子溅射  Ar ion sputtering

DC磁控溅射  magnetron sputtering

ECR磁控溅射  ECR magnetron sputtering

ECR溅射镀膜  ECR sputtering plating film

ECR微波等离子体反应溅射  ECR sputtering

MCECR等离子体溅射  MCECR plasma sputtering method

MoS2基共溅射薄膜  MoS2 based cosputtered films

MoS2溅射膜  MoS2 sputtered films; sputtered MoS 2 film

PLD溅射  PLD sputtering

PVD溅射  PVD sputtering

RF磁控溅射  RF magnetron sputtering

RF反应磁控溅射  RF reactive magnetron sputtering

RF反应溅射  RF actively sputtering