193nmArF激光光刻
193nm ArF laser lithography
X射线荧光光光谱
X-ray fluorescence spectrometry
步进式曝光蚀刻
optical stepper lithography
超紫外光蚀刻技术
extreme uitraviolet lithography
电镀结合光刻法
electroplating and lithography method
光刻法
photoresist process
photolithography
photolithographic technique
photolithographic beam
photomasking
photoprocessing
photo-etching
光刻蚀清晰度
Photolithographic resolution
光蚀刻清晰度
optical lithographic resolution