电子束步进重复照相机
electron beam image repeater
多路步进重复照相机
multiple step and repeat machine
步进重复照相术
step and repeat photography
步进重复光刻
step and repeat lithography
stepper lithography
长程光学照相机
long-range optical camera (Loroc
电子曝光照相机
electronic exposure camera
分步重复光刻机
Step-and-repeat photoetching machines
光学-光学双共振
Optical-optical double resonance