感应耦合型等离子体蚀刻系统
inductively coupled plasma etching system
圆筒型等离子体蚀刻系统
barrel type plasma etching system
等离子体分离过程
plasma separation process
磁控管增强型反应性离子蚀刻系统
magnetron enhanced reactive ion etaching system
等离子体刻蚀技术
Plasma etching technology
等离子体离子辅助镀膜
plasma assisted deposition
电感耦合等离子体(ICP)刻蚀
inductive coupled plasma(ICP) etching
icp-rie
感应耦合等离子体(ICP)刻蚀
inductively coupled plasmas(ICP) etching
inductively coupled plasma(ICP) etching
感应耦合等离子体ICP刻蚀
inductively coupled plasmas ICP etching