飞秒激光微纳加工
femtosecond laser micromachining
微纳超精细加工
top-down nano-fabrication processes
微纳米加工技术
micro and nanofabrication technology
表面微加工工艺
Surface-micromachining process
体硅微加工工艺
bulk silicon micromachining
silicon bulk micromachining
bulk-micromachining
3D电化学微加工
electrochemical 3D micromachining technology
SOI单晶矽体型微加工制程
SOI Bulk Micromachining Process
表面微加工
surface micro-machining
surface micromachining
surface-micromachining technology
超精微加工
ultra miniaturization manufacturing
电化学微加工
Electrochemical micromachining
飞秒激光微加工
femtosecond micromachining
非硅表面微加工
non-silicon surface micromachining
non-silicon surface machining
硅体微加工
silicon bulk micromachining