浸液式扫描曝光机
Immersion scanning exposure tools
扫描式投影曝光
scanning projection printing
步进扫描式光刻机
the step and scan lithography
步进式扫描光刻机
Step-and-scan Lithography
激光立体扫描曝光成像
laser stereo scanner exposure imaging
激光扫描光聚焦显微镜
laser scanning confocal microscopy
激光扫描光学系统
laser scanning optical system
扫描式ICP光谱仪
sequential ICP spectrometer
3维激光扫描技术
3D laser scanning technology