无掩模光刻
maskless lithography
Maskless lithography technology
准分子激光光刻技术
Excimer laser Microlithography
全息掩模技术
holographic mask technology
移相掩模技术
phase-shifting mask technology
193nmArF光刻技术
193 nm ArF lithography technique
193nmArF浸没式光刻技术
193 nm ArF immersion lithography technicque
EUV光刻技术
EUV lithography technicque
电子束光刻技术
electron-beam lithography technology