线整片晶圆对准曝光器
X-ray full wafer aligner x
椭圆旋转对称群
ellipse rotating symmetric group
对准误差分析
Analysis of the alignment errors
积分绝对误差准则
integral absolute error criterion
激光束与扫描镜对准误差
Laser beam misalignment with scanner mirror
时积积分绝对误差准则
integral-of-time-multiplied absolute-error criterion
探头角度定位旋转误差
rotation error of probe angle location