步进式扫描光刻机
Step-and-scan Lithography
薄片的步进式光刻
wafer stepper lithography
步进扫描投影对准曝光器
step and scan projection aligner
步进扫描投影光刻
Step-and-scan Lithography
步进扫描投影光刻机
step and scan projection lithography
step-and-scan lithography system
二维光机扫描
two dimensional opti mechanism scan
光机扫描
optical mechaical scanning
optical mechanical scanning
光机扫描仪
opto-mechanical scanning imager
激光扫描光聚焦显微镜
laser scanning confocal microscopy
激光扫描光学系统
laser scanning optical system