大束流低能注入
Large beam low-energy Implantation
低能N(+)注入
low N(+) ions implantation
低能N~+注入
Low-energy N~+ implantation
线性注入激光二极管
linear injectino laser diode
linear injection laser diode
选择性注入集电极
Selectively implanted collector
增注性能
augmented injection performance