赛斯专业词典
滚转角误差
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转差转差率滑率滑距
Slip
转角误差
Tilt angular errors
翻滚误差
Tumbling error
滚转角
roll angle
angle of roll
rolling angle
rotation angle
Roll
robot
滚转角辨识
roll angle determination
滚转角测量
Rolling angle measurement
滚转角时间历程
roll angle history
横滚误差补偿
roll error compensation
标线旋转误差
reticle rotation error
翻转误差
reversal
回转误差
rotary accuracy
rotation error
rotating error
rotary error
turning error
Rotary errors
Rotational error
回转误差运动
rotating error motion
交替误差转回
alternate error return
晶圆对准旋转误差
wafer rotation error
径向回转误差
radial rotating error
radial revolving error
倾角回转误差
Rotaiton angular error
wobble
探头角度定位旋转误差
rotation error of probe angle location
停转转差率
breakdown slip
误差转换矩阵
error transformation matrix
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