电子回旋共振微波反应等离子体
ECR electron cyclotron resonance plasma
多圆片等离子体反应器
multiwafer plasma reactor
填充床放电等离子体反应器
packed-bed discharge plasma reactor
圆柱形等离子体反应器
cylindrical plasma reactor
靶等离子体反常效应
Target plasma Anomalous effect
等离子体化学反应
Plasma chemical reaction
plasma chemistry reaction
动态反应池－电感耦合等离子体质谱仪
dynamic reaction cell-inductively coupled plasma mass spectrometry
dynamic reaction cell-inductively coupled plasma m
等离子体离子辅助镀膜
plasma assisted deposition