等平面自对准工艺
equi-planar and self-aligned technology
多晶硅自对准工艺
polysilicon self aligned process
psa
金属自对准工艺
metal self aligned process
不严格对准光刻
relaxed registration photolithography
光刻对准技术
lithography alignment technology
干膜抗蚀剂光刻工艺
dry film photo processing
光刻工艺
photoetching technology
lithography technology
lithography process
photolithography process
photolithographic process
lithographic process
CCD激光自准直测量
CCD laser collimation measure
非自对准场区掺杂
Non-self alignment field doping
改进型自对准多晶硅栅工艺
advanced polysilicon self aligned process
APSA