等平面自对准工艺
equi-planar and self-aligned technology
多晶硅自对准工艺
polysilicon self aligned process
psa
金属自对准工艺
metal self aligned process
微波催化氧化工艺
microwave-induced oxidation process
标准化自对比
normalized autocorrelation
碱催化自氧化反应
base-catalyzed autoxidation
平面厚膜工艺
plane thick-film technique
氧化膜厚
thickness of oxidation film
丙烷氨氧化工艺
propane ammoxidation process
部分氧化工艺
partial oxidation process
臭氧化—氧化分解反应
ozonidation-oxidation decomposition reaction