等平面自对准工艺
equi-planar and self-aligned technology
多晶硅自对准工艺
polysilicon self aligned process
psa
非接触自动监测
Non-contact Auto-Monitoring
非自对准场区掺杂
Non-self alignment field doping
改进型自对准多晶硅栅工艺
advanced polysilicon self aligned process
APSA
硅栅自对准结隔离互补金属氧化物半导体
silicon gate self aligned junction isolated cmos
金属自对准工艺
metal self aligned process
扩散自对准金氧半导体集成电路
diffusion self-alignment MOS integrated circuit