静电梳齿驱动
electrostatic comb driving
微静电驱动器
Micro electrostatic actuator
电驱动+电动缸的控制系统
Control System of Driving with Motor and Jar
MEMS静电驱动
electrostatically actuated MEMS
静电驱动
electrostatic drive
electrostati c driving
electrostatic actuating
Electrostatic actuation
electrostatic force driving
electrostatically-driven
electrostatics comb actuator
electrostatically driven
electrostatic actuate
Electrostatically actuated
electrostatic driving
electrostatic driver
Relays
electrostatic driven
electrostatic actuator
静电驱动梁
electrically actuated microbeam
静电梳齿微执行器
electrostatic comb micro-actuator
符合-记录器驱动电路
coincidence-register drive circuit