不严格对准光刻
relaxed registration photolithography
光刻对准技术
lithography alignment technology
自对准光刻工艺
self aligned photoresist process
193nmArF激光光刻
193nm ArF laser lithography
X射线荧光光光谱
X-ray fluorescence spectrometry
激光光刻系统
Laser lithographic system
远紫外线投影曝光对准器
deep uv projection aligner
准分子激光光刻
excimer laser lithography
准分子激光光刻技术
Excimer laser Microlithography