干膜抗蚀剂光刻工艺
dry film photo processing
自对准光刻工艺
self aligned photoresist process
微光刻技术
micro-lithography
Optical microlithography
microlithography technology
投影光刻系统
lithography projection system
投影光刻物镜
projection lithography lens
投影光刻法
projection photolithography
扫描投影光刻机
scanning projection lithography tool
软光刻技术
Soft lithography
soft-lithography technology