步进式曝光蚀刻
optical stepper lithography
超紫外光蚀刻技术
extreme uitraviolet lithography
光刻蚀清晰度
Photolithographic resolution
光蚀刻清晰度
optical lithographic resolution
近场光刻蚀
near field photolithography
photolithography in optical near field
真空紫外光刻蚀
vacuum ultraviolet lithography etching
干膜抗蚀剂光刻工艺
dry film photo processing
光电化学刻蚀
photo electrochemical etching