157nm光学光刻
157nm optical lithography
157um optical lithography
传统光学投影光刻
conventional optical projection lithography
光电化学刻蚀
photo electrochemical etching
光电化学蚀刻
Photo-electrochemical etching
光学投影蚀刻
optical projection lithography
激光辅助化学刻蚀
laser assisted chemical etching
激光化学刻蚀
laser chemical etching
laser assisted chemical etching
光学-光学双共振
Optical-optical double resonance
193nmArF激光光刻
193nm ArF laser lithography