浸没式ArF光刻
Immersion ArF Lithography
ArF immersion lithography
浸入式光刻技术
Immersion lithography technology
精密光刻
precision photolithography
聚焦离子束光刻
focused ion beam lithography
FIBL
冷压印光刻
room-temperature imprint lithography
离子束投影光刻
Ayrton-Mother galvanometer