平行板等离子体腐蚀装置
parallel plate plasma etcher
等离子体离子辅助镀膜
plasma assisted deposition
高频等离子体腐蚀
radio frequency plasma etch
微波等离子体离子化检测器
microwave induced plasma ionization detector
重离子等离子体加速器
heavy ion plasma accelerator
面向等离子体材料
plasma facing materials PFM
plasma facing materials
tungsten
任意磁化方向等离子体
Arbitrary magnetized direction plasma