半导体显微光刻
semiconductor microlithography
全息微光刻
Holographic microlithography
微光刻技术
microlithography technology
Optical microlithography
micro-lithography
显微光刻图像形成
microlithographic patterning
光助微刻蚀
Photoassisted microetching
深亚微米光刻
deep sub-micron photolithography
数字微镜器件(DMD)并行光刻
digital micro-mirror divice(DMD) based parallel lithography
锑化镓的光助微刻蚀
Photomicroetching of GaSb