机电伺服机构
Electromechanical servo mechanism
电磁型微电机
Electro magnetism micro motor
电磁型微型电动机
electro-magnetic micro-motor
发电机微机励磁实验装置
generator microcomputer-based excitation system for experiment
静电微电机
Electrostatic micromotor
electrostatically micromachined motor
驱动脉冲用微型电机
micromotor for drive pulse
微机伺服系统
microcomputer servo control system
微机型电动机保护
microcomputer motor protection
microprocessor-based motor protection
微型机电系统
MEMS
Micro electromechanical system
Micro-electromechanical System
microelectromechanical system
microelec tromechanical systems
微型伺服驱动器
minitype servo controller
压电薄膜型微电机
piezoelectric thin film micromotor
压电微电机
PZT micromotor
Piezoelectric micromotor
piezoelectric motors
micro piezoelectric motor