并联微纳操作器
parallel micro-nano-manipulator
parallel micro-nano manipulator
仿生导航微纳传感器
Bionic navigation microsensor
分级微纳结构
hierarchical micro-nanostructures
微纳表层杂质
Micro-nano surface impurity
微纳超精细加工
top-down nano-fabrication processes
微纳传动平台
nano-transmission platform
微纳电子技术
micronanoelectronic technology
微纳定位/进给
micro-nano positioning and feeding
微纳复合结构
micron-nanometer compound structure
微纳光电子学
micro-nano optoelectronic