193nmArF激光光刻
193nm ArF laser lithography
X射线荧光光光谱
X-ray fluorescence spectrometry
激光光刻系统
Laser lithographic system
准分子激光光刻
excimer laser lithography
准分子激光光刻技术
Excimer laser Microlithography
磁流变光整加工
Association of Science and Technology
magnetorheological finishing
magneto-rheological finishing