单晶圆加工洗涤机
single wafer processing cleaner
v×B加热机制
v×B acceleration mechanism
vB加热机制
vB acceleration mechanism
持续非绝热加热
persistent diabatic heating
大气非绝热加热
Atmospheric diabatic heating
非绝热加热
Non-uniform heating
Diabatic heating
Atmospheric diabatic heating
Diabalic heating
非绝热加热廓线
adiabatic heating profile