X射线曝光因数自动记录器
automatic X-ray exposure factor recorder
薄片的步进式投影曝光装置
wafer stepper projection system
步进扫描投影对准曝光器
step and scan projection aligner
步进式投影对准曝光器
stepping projection aligner
超小电流曝光
ultra low current exposure
程序自动曝光
program automatic exposure