i线曝光系统
Exposure systerm of i-line
电子波束曝光系统
electron beam exposure system
电子束曝光系统
Electron beam lithography system
E-beam lithography system
A(N)=0双波长补偿系数光度法
A(N)=0 dual-wavelength compensation coef
X射线荧光光光谱
X-ray fluorescence spectrometry
比消光系数
extinction coefficient
Specific extinction coefficient