极紫外光刻
EUV lithography
Extreme ultraviolet lithography
annual constituent
EUVL
真空紫外-紫外光谱
Vacuum ultraviolet-spectroscopy
极端远紫外光刻技术
Extreme ultraviolet lithography
极紫外光学
extreme ultraviolet optics
极紫外光源
Extreme ultraviolet source
EUV light source
微波无极紫外光催化
microwave electrodeless ultraviolet photocatalysis
红外-紫外光谱
Infrared-ultraviolet spectrum
远紫外光刻
Extreme ultraviolet lithography
真空紫外光刻
vacuum ultraviolet lithography VUV
Camellia oleifera Aberl cake
真空紫外光刻蚀
vacuum ultraviolet lithography etching
真空紫外紫外激发光谱
VUV UV excitation spectra