极端远紫外光刻技术
Extreme ultraviolet lithography
极端远紫外线光刻
Extreme ultraviolet lithography
极紫外光刻
annual constituent
EUV lithography
EUVL
Extreme ultraviolet lithography
真空紫外-紫外光谱
Vacuum ultraviolet-spectroscopy
准分子激光光刻技术
Excimer laser Microlithography
极紫外光学
extreme ultraviolet optics
极紫外光源
Extreme ultraviolet source
EUV light source
极紫外线
extreme ultraviolet
EUV
extreme ultra-violet (EUV