193nmArF激光光刻
193nm ArF laser lithography
激光光刻系统
Laser lithographic system
准分子激光光刻
excimer laser lithography
准分子激光光刻技术
Excimer laser Microlithography
激光干涉光刻
Interferometric lithography
Laser interferometric lithography
激光全息光刻
laser holographic lithography
anti-misoperation logic
激光投影光刻
laser projection lithography
分步重复光刻机
Step-and-repeat photoetching machines
电子投影金属版印刷-电子投影光刻
electron beam lithography
电子束直写光刻
electron beam direct writing lithography
电子束光刻技术
electron-beam lithography technology