激光自准直经纬仪
laser autocollimator theodolite
NJG型真空激光准直系统
NJG vacuum laser alignment System
倒置激光准直望远镜
inverse collimation telescope
激光准直测量
laser alignment measurement
laser collimating measurement
激光准直法
method of laser alignment
真空激光准直
Vacuum laser alignment
laser collimation in vacuum line
真空激光准直系统
vacuum laser collimation system
自准直激光矢量速度计
self-aligning laser vector velocimeter
193nmArF激光光刻
193nm ArF laser lithography