实验剂量准确度
accuracy of experimental dose
Y轴定位精确度
X-Y axis positioning accuracy X
Z轴定位精确度
Z axis positioning accuracy
并行控制的正确度
correctness of concurrency control
波长精确度
accuracy of the wavelength
波长准确度及重复性
wavelength accuracy and repeatability
不等准确度测量
unequally accurate measurement