等离子化学汽相淀积
Plasma chemical vapor deposition
等离子增强化学气相沉积
Plasma enhanced chemical vapor deposition
PECVD
等离子增强化学气相沉积(PECVD)
Plasma enhanced chemical vapor deposition
barometer box
高压高功率(hphP)甚高频等离子增强化学气相沉积(VHF-PECVD)
high pressure and high power(hphP) VHF-PECVD
脉冲等离子增强化学气相沉积
pulse plasma enhance chemical vapor deposition
等离子体增强化学汽相淀积
plasma enhanced chemical vapour deposition
PATplasma enhanced chemical vapor deposition
PDLplasma enhanced chemical vapor deposition
PDIPplasma enhanced chemical vapor deposition
peak valueplasma enhanced chemical vapor deposition
PECVD
离子增强沉积
ion beam enhanced deposition
变化化学汽相积沈
modified chemical vapor deposition
MCVD
常压化学汽相沉积
atmospheric pressure chemical vapor deposition
低压化学汽相沉积
lithographylow pressure chemical vapor deposition
lost calls heldlow pressure chemical vapor deposition
LPCVD