等平面自对准工艺
equi-planar and self-aligned technology
多晶硅自对准工艺
polysilicon self aligned process
psa
金属自对准工艺
metal self aligned process
改进型自对准多晶硅栅工艺
advanced polysilicon self aligned process
APSA
自对准多晶硅工艺
self aligned polysilicon process
自对准光刻工艺
self aligned photoresist process
非自对准场区掺杂
Non-self alignment field doping
硅栅自对准结隔离互补金属氧化物半导体
silicon gate self aligned junction isolated cmos
扩散自对准金氧半导体集成电路
diffusion self-alignment MOS integrated circuit