光刻对准技术
lithography alignment technology
有源对准技术
active alignment technique
弛豫-析出控制相变技术(RPC技术)
relaxation-precipitation controlling phase transformation technique(RPC technique
固—液分离技术技术
Solid-liquid separation technology
流式细胞微球芯片捕获技术CBA技术
Cytometric Bead Array CBA method
半自动式故障分隔检查术技术
fault lsolation by semiautomatic techniques {= FIST
等平面自对准工艺
equi-planar and self-aligned technology
多晶硅自对准工艺
polysilicon self aligned process
psa
非自对准场区掺杂
Non-self alignment field doping
改进型自对准多晶硅栅工艺
advanced polysilicon self aligned process
APSA
硅栅自对准结隔离互补金属氧化物半导体
silicon gate self aligned junction isolated cmos