薄片的步进式投影曝光装置
wafer stepper projection system
步进顺序控制
Stepping sequence control
步进顺控指令
stepping sequence control command
步进输送驱动系统
workpiece step transmission driving mechanism
步进式自动放绳装置
Automatic device of step-by-step falling ropes
步进式液压顶推系统
step-type hydraulic push system
步进式平面循环烧结机
step type plane circulating sintering machine