第二代接近式X射线光刻
second generation proxi mity X-raylithography
扫描投影光刻机
scanning projection lithography tool
步进扫描投影光刻机
step-and-scan lithography system
step and scan projection lithography
光刻机
Stepper
Photolithographic systems
lithographic tools
Lithography tool
photographic machine
mask aligner
lithography machine
asbestos dust sampler
lithograph equipment
lithography
photolithography
photolithography equipment
photoetching machine
wafer stepper
lithography system
optical engraver
lithography equipment
分步重复光刻机
Step-and-repeat photoetching machines
193nm光刻机
193 nm lithography equipment