梳齿状电容微加速度计
Capacitive micro-accelerometer
梳齿式微机械加速度计
comb-finger micro accelerometer
梳齿式汽封
rack-type labyrinth steam seals
斜齿梳齿刀
Oblique tooth slotting cutter
迷宫梳齿式汽封
labyrinth comb-teeth type steam seal gland
静电梳状驱动器
Electrostatic comb actuator
静电梳微谐振子
Electro-static Driven Comb
Electro-Static Driven Comb Micro-resonant Structure
静电梳微谐振器
Electro-static driven comb microresonator
静电梳齿微执行器
electrostatic comb micro-actuator